ICSPI
Waterloo designer and manufacturer of desktop atomic force microscopes built on a single-chip MEMS AFM, together with a semiconductor metrology system for detecting nanometre-scale defects on wafers.
Canadian innovation builds a brighter tomorrow.
About
Source: icspicorp.comICSPI designs and manufactures atomic force microscopes built on a single-chip MEMS AFM, which places the scanner, actuators and sensor on one microfabricated die. The company states that its sensor technology was developed over ten years at the University of Waterloo. Its products include desktop AFM instruments and the automated Redux AFM with a motorized XY stage that handles 100 mm wafers, and it is developing a microAFM-based semiconductor metrology system aimed at detecting nanometre-scale defects substantially faster than current industry tools.
Received a $623,000 FABrIC award in June 2025 for a microAFM semiconductor metrology system. fabricinnovation.ca
FABrIC describes the project as aimed at detecting nanometre-scale defects roughly 100 times faster than current industry tools. fabricinnovation.ca
Its sensor technology was developed over ten years at the University of Waterloo. icspicorp.com
Launched the Redux AFM, an automated atomic force microscope with a motorized XY stage handling 100 mm wafers. icspicorp.com
Government & Grants
Government support actually received. Unpublished amounts are left out.
FABrIC, administered by CMC Microsystems, for a microAFM semiconductor metrology system
People
Sourced from the company's own pages or announcements.
David Morris
Chief Executive Officer
Neil Sarkar
Co-Founder
Raafat Mansour
Co-Founder
Technology Focus
Company site: icspicorp.comTerms the company uses about its own work.
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